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1

SPIE Proceedings [SPIE SPIE Photomask Technology - Monterey, California, United States (Tuesday 16 September 2014)] Photomask Technology 2014 - Development and characterization of advanced phase-shift mask blanks for 14nm node and beyond

Ackmann, Paul W., Hayashi, Naoya, Kim, Chang-Jun, Jang, Kyu-Jin, Choi, Min-Ki, Yang, Chul-Kyu, Lee, Jae-Chul, Lee, Jong-Keun, Kang, Byung-Sun, Lee, Jong-Hwa, Shin, Cheol, Nam, Kee-Soo

Year:

2014

Language:

english

File:

PDF, 874 KB

english, 2014

2

Passivation effect of (nh4)2sx treatment on gaas surface before photo-resist and o2 processes

Kyung-Soo Suh, Jong-Lam Lee, Hyung-Ho Park, Chan-Ho Kim, Jae-jin Lee, Kee-Soo Nam

Journal:

Materials Science and Engineering: B

Year:

1996

Language:

english

File:

PDF, 430 KB

english, 1996

3

SPIE Proceedings [SPIE 27th Annual BACUS Symposium on Photomask Technology - Monterey, CA (Monday 17 September 2007)] Photomask Technology 2007 - Investigation of airborne molecular contamination adsorption rate as storage materials in mask

Yang, Chul-Kyu, Naber, Robert J., Kawahira, Hiroichi, Cha, Han-Sun, Yang, Sin-Ju, Kang, Ju-Hyun, Ahn, Jin-Ho, Nam, Kee-Soo

Year:

2007

Language:

english

File:

PDF, 805 KB

english, 2007

4

[IEEE 1997 6th International Symposium on the Physical and Failure Analysis of Integrated Circuits - Singapore (21-25 July 1997)] Proceedings of the 1997 6th International Symposium on the Physical and Failure Analysis of Integrated Circuits - Reliability investigation of ultrathin oxides grown by high pressure oxidation and nitrided in N/sub 2/O for ULSI device applications

Tae Moon Roh,, Dae Woo Lee,, Jongdae Kim,, Kyu Ha Baek,, Jin Gun Koo,, Duk Dong Lee,, Kee-Soo Nam,

Year:

1997

Language:

english

File:

PDF, 415 KB

english, 1997

5

Influence of TiAs precipitate formation on morphology degradation of the TiSi2/As-doped polysilicon system

Hyung-Ho Park, Jeong Yong Lee, Kyoung-Ik Cho, Mun-Cheol Paek, Oh-Joon Kwon, Chi-Kyu Choi, Kee-Soo Nam

Journal:

Thin Solid Films

Year:

1992

Language:

english

File:

PDF, 448 KB

english, 1992

6

[IEEE International Electron Devices Meeting. Technical Digest - Washington, DC, USA (2-5 Dec. 2001)] International Electron Devices Meeting. Technical Digest (Cat. No.01CH37224) - Real impact of W/WNx/Poly-Si gate stack in volume production of high density DRAM

Il-Gweon Kim,, Nam-Sung Kim,, Jun-Ho Choy,, Byung-Hak Lee,, Yong-Gue Sung,, Jong-Hwan Kim,, Jin-Hee Cho,, Dong-Chan Kim,, Kee-Soo Kim,, Jo-Bong Choi,, Se-Kyoung Choi,, Young-Woo Kweon,, Ho

Year:

2001

Language:

english

File:

PDF, 530 KB

english, 2001

7

The Electrical Properties of Polyoxide Depending on the Polycrystalline-Si Formation Conditions

Yi, Kyoung-Soo, Cho, Deok-Ho, Lee, Jeong Yong, Nam, Kee-Soo, Kang, Sang-Won, Lee, Jin-Hyo

Journal:

MRS Proceedings

Year:

1990

Language:

english

File:

PDF, 1.26 MB

english, 1990

8

A New Annealing Method to Obtain High Quality Poly-Si

Song, Yoon-Ho, Baek, Jong-Tae, Nam, Kee-Soo, Kang, Sang-Won

Journal:

MRS Proceedings

Year:

1992

Language:

english

File:

PDF, 1.89 MB

english, 1992

9

Large field emission current density from well-aligned carbon nanotube field emitter arrays

Jung Inn Sohn, Seonghoon Lee, Yoon-Ho Song, Sung-Yool Choi, Kyoung-Ik Cho, Kee-Soo Nam

Journal:

Current Applied Physics

Year:

2001

Language:

english

File:

PDF, 699 KB

english, 2001

10

Analysis of Si1−xGex on Si heterostructures grown by MBE as a function of substrate temperature

Sang-Gi Kim, Jongdae Kim, In-Ho Bae, Jin Gun Koo, Kee-Soo Nam

Journal:

Journal of Crystal Growth

Year:

1998

Language:

english

File:

PDF, 579 KB

english, 1998

11

SPIE Proceedings [SPIE SPIE Photomask Technology - Monterey, CA (Monday 14 September 2009)] Photomask Technology 2009 - The study of the birefringence as MoSi based materials for immersion lithography

Kang, Ju-Hyun, Zurbrick, Larry S., Montgomery, M. Warren, Cha, Han-Sun, Yang, Sin-Ju, Ahn, Jin-Ho, Nam, Kee-Soo

Year:

2009

Language:

english

File:

PDF, 773 KB

english, 2009

12

Fabrication of thin film transistors using a Si/Si/sub 1-x/Ge/sub x//Si triple layer film on a SiO2 substrate

Jin Hyeok Kim, Jeong Yong Lee, Hong Seung Kim, Yoon-ho Song, Kee-soo Nam

Journal:

IEEE Electron Device Letters

Year:

1996

Language:

english

File:

PDF, 404 KB

english, 1996

13

Thin-Film Transistors with Polycrystalline Silicon Prepared by a New Annealing Method

Nam, Kee-Soo, Song, Yoon-Ho, Baek, Jong-Tae, Kong, Hong-Jin, Lee, Sang-Soo

Journal:

Japanese Journal of Applied Physics

Year:

1993

File:

PDF, 406 KB

1993

14

SPIE Proceedings [SPIE SPIE Photomask Technology - Monterey, CA (Monday 14 September 2009)] Photomask Technology 2009 - Behavior of the molybdenum silicide thin film by 193nm exposure

Yang, Sin-Ju, Zurbrick, Larry S., Montgomery, M. Warren, Cha, Han-Sun, Ahn, Jin-ho, Nam, Kee-Soo

Year:

2009

Language:

english

File:

PDF, 976 KB

english, 2009

15

SPIE Proceedings [SPIE Photomask and Next Generation Lithography Mask Technology XII - Yokohama, Japan (Wednesday 13 April 2005)] Photomask and Next-Generation Lithography Mask Technology XII - A study of storage life extension for high performance chemically amplified resist coated blanks

Yang, Sin-Ju, Komuro, Masanori, Seo, Sung-Min, Ko, Sang-Hoon, Cha, Han-Sun, Kang, Geung-Won, Nam, Kee-Soo, Seo, Woong-Won, Jung, Woo-Kyun, Cho, Hyun-Kyoon, Kim, Jin-Min, Choi, Sang-Soo

Year:

2005

Language:

english

File:

PDF, 760 KB

english, 2005

16

SPIE Proceedings [SPIE 27th Annual BACUS Symposium on Photomask Technology - Monterey, CA (Monday 17 September 2007)] Photomask Technology 2007 - A study of haze generation as thin film materials

Kang, Ju-Hyun, Naber, Robert J., Kawahira, Hiroichi, Cha, Han-Sun, Yang, Sin-Ju, Yang, Chul-Kyu, Ahn, Jin-Ho, Nam, Kee-Soo, Kim, Jong-Min, Patil, Manish, Hur, Ik-Bum, Choi, Sang-Soo

Year:

2007

Language:

english

File:

PDF, 444 KB

english, 2007

17

Integration of 5-V CMOS and High-Voltage Devices for Display Drive Applications

Kim, Jongdae Kim, Park, Mun-Yang Park, Kang, Jin Yeong Kang, Lee, Sangyong Lee, Koo, Jin-Gun Koo, Nam, Kee-Soo Nam

Journal:

Year:

1998

Language:

english

File:

PDF, 362 KB

english, 1998

18

The Characterization of Al2O3 Films Grown by Atomic Layer Deposition Using Al(CH3)3 and H2O

Yun, Sun Jin, Lee, Kyung-Ho, Skarp, Jarmo, Kim, Hae-Rim, Nam, Kee-Soo

Journal:

MRS Proceedings

Year:

1997

Language:

english

File:

PDF, 918 KB

english, 1997

19

Corrosion at the Grain Boundary and a Fluorine-Related Passivation Layer on Etched Al-Cu (1%) Alloy Surfaces

Baek, Kyu-Ha Baek, Yoon, Yong-Sun Yoon, Park, Jong-Moon Park, Kwon, Kwang-Ho Kwon, Kim, Chang-Il Kim, Nam, Kee-Soo Nam

Journal:

Year:

1999

Language:

english

File:

PDF, 332 KB

english, 1999

20

A fluorine-related passivation layer on etched Al–Cu (1%) alloy surfaces on silicon after SF6 plasma treatments

Kyu-Ha Baek, Yong-Sun Yoon, Jong-Moon Park, Kwang-Ho Kwon, Chang-Il Kim, Kee-Soo Nam

Journal:

Materials Letters

Year:

1998

Language:

english

File:

PDF, 264 KB

english, 1998

21

Field-Effect Conductance Activation Energy in Polycrystalline Silicon Thin-Film Transistors after Bias Stress

Kim, Seo-Yoon, Song, Yoon-Ho, Nam, Kee-Soo, Lee, Choochon

Journal:

Japanese Journal of Applied Physics

Year:

1996

Language:

english

File:

PDF, 167 KB

english, 1996

22

Plasma electron density generated by a semiconductor bridge as a function of input energy and land material

Jongdae Kim, Kee-Soo Nam, Jungling, K.C.

Journal:

IEEE Transactions on Electron Devices

Year:

1997

Language:

english

File:

PDF, 121 KB

english, 1997

23

Patterned selective growth of carbon nanotubes and large field emission from vertically well-aligned carbon nanotube field emitter arrays

Sohn, Jung Inn, Lee, Seonghoon, Song, Yoon-Ho, Choi, Sung-Yool, Cho, Kyoung-Ik, Nam, Kee-Soo

Journal:

Applied Physics Letters

Year:

2001

Language:

english

File:

PDF, 544 KB

english, 2001

24

An Amorphous Silicon Local Interconnection(ALSI) CMOS with Self-Aligned Source/Drain and Its Electrical Characteristics

Yoon, Yong-Sun Yoon, Baek, Kyu-Ha Baek, Park, Jong-Moon Park, Nam, Kee-Soo Nam

Journal:

Year:

1997

Language:

english

File:

PDF, 381 KB

english, 1997

25

Large Field Emission from Vertically Well-aligned Carbon Nanotubes

Sohn, Jung Inn, Lee, Seonghoon, Song, Yoon-Ho, Choi, Sung-Yool, Cho, Kyoung-Ik, Nam, Kee-Soo, Kang, Young-Il

Journal:

MRS Proceedings

Year:

2000

Language:

english

File:

PDF, 1.74 MB

english, 2000

26

SPIE Proceedings [SPIE 27th Annual BACUS Symposium on Photomask Technology - Monterey, CA (Monday 17 September 2007)] Photomask Technology 2007 - The behavior of substrate dependency as surface treatment in the positive chemically amplified resist

Yang, Sin-Ju, Naber, Robert J., Kawahira, Hiroichi, Cha, Han-Sun, Kang, Ju-Hyun, Yang, Chul-Kyu, Ahn, Jin-Ho, Nam, Kee-Soo

Year:

2007

Language:

english

File:

PDF, 464 KB

english, 2007

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